Preparation and characterization of SnO2: F thin films deposited by spray pyrolysis technique for TCO´s applications

Thin films of SnO2:F were deposited on glass substrates using spray pyrolysis technique. A solution of tin dichloride SnCl2.2H2O, to which was added ammonium fluoride (10 wt. % NH4F) in order to improve its optical and electrical properties, was used for sample preparation. The films were deposited...

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Autores Principales: Miranda, Héctor, Watson, Amanda, Abrego, Ildemán, Ching-Prado, Eleicer
Formato: Artículo
Idioma: Español
Publicado: Universidad Tecnológica de Panamá 2016
Materias:
Acceso en línea: http://revistas.utp.ac.pa/index.php/id-tecnologico/article/view/592
http://ridda2.utp.ac.pa/handle/123456789/2176
Sumario: Thin films of SnO2:F were deposited on glass substrates using spray pyrolysis technique. A solution of tin dichloride SnCl2.2H2O, to which was added ammonium fluoride (10 wt. % NH4F) in order to improve its optical and electrical properties, was used for sample preparation. The films were deposited with different thicknesses, since 140 nm to 732 nm and sintered at 500 °C. Semi-automated deposition equipment allowed thickness control of the samples. The surface morphology of the films was study by Scanning Electron Microscopy (SEM). UV-visible spectroscopy revealed that the films have a high optical transmittance in the visible range, between 74 and 87 %, while the average band gap is around 3,99 eV. Using the four-point Van der Pauw technique, the electrical properties of the samples were studied. The minimum sheet resistance obtained was 78,7 Ω /  for a thickness of 356 nm which correspond to a resistivity and figure of merit values of 2,80x10-3 Ω-cm and 2,00x10-3 Ω-1 respectively. The excellent optical and electrical properties obtained are comparable with results obtained using more expensive techniques. Therefore, the spray pyrolysis technique can be considered as an economical alternative and viable for mass production of transparent conducting oxides for use in solar cells, transparent electrodes and other optoelectronic devices.